Patent Assignment
Reel/Frame 043997/0145
Assignment of Assignor's Interest
Recorded: 2017-10-31
Pages: 3
Assignors
BELAU, LEONID
Executed: 2017-10-30
HUDSON, ERIC
Executed: 2017-10-30
ROBERTS, FRANCIS SLOAN
Executed: 2017-10-30
Assignee
LAM RESEARCH CORPORATION
4650 CUSHING PARKWAY, FREMONT, CALIFORNIA, 94538
Covered Property
(1)
Method for Etching Features in a Stack