Patent Assignment
Reel/Frame 044005/0365
Assignment of Assignor's Interest
Recorded: 2017-11-01
Pages: 3
Assignee
SCREEN HOLDINGS CO., LTD.
TENJINKITA-MACHI 1-1, TERANOUCHI-AGARU 4-CHOME, HORIKAWA-DORI, KAMIGYO-KU, KYOTO-SHI, KYOTO, 602-8585, JAPAN
Covered Property
(1)
Chemical Liquid Preparation Method of Preparing a Chemical Liquid for Substrate Processing, Chemical Liquid Preparation Unit Preparing a Chemical Liquid for Substrate Processing, and Substrate Processing System