Patent Assignment
Reel/Frame 044012/0430
Assignment of Assignor's Interest
Recorded: 2017-11-01
Pages: 3
Assignee
TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
NO.8, LI-HSIN RD.6, SCIENCE-BASED INDUSTRIAL PARK, HSINCHU, 300, TAIWAN
Covered Property
(1)
Etch Method with Surface Modification Treatment for Forming Semiconductor Structure
Patent:
10,163,623 →
Application:
15/799,489 →