Patent Assignment
Reel/Frame 044116/0119
Assignment of Assignor's Interest
Recorded: 2017-11-14
Pages: 3
Assignors
PEETHALA, CORNELIUS BROWN
Executed: 2017-11-13
DE SILVA, EKMINI A.
Executed: 2017-11-13
ARCEO DE LA PENA, ABRAHAM
Executed: 2017-11-13
Assignee
INTERNATIONAL BUSINESS MACHINES CORPORATION
NEW ORCHARD ROAD, ARMONK, NEW YORK, 10504
Covered Property
(1)
Dry and Wet Etch Resistance for Atomic Layer Deposited TIO2 for Sit Spacer Application