Patent Assignment
Reel/Frame 044201/0902
Assignment of Assignor's Interest
Recorded: 2017-11-22
Pages: 5
Assignors
GRUNZWEIG, TZAHI
Executed: 2017-11-16
PIO, JORDAN
Executed: 2017-11-16
SVIZHER, ALEXANDER
Executed: 2017-11-15
Assignee
KLA-TENCOR CORPORATION
ONE TECHNOLOGY DRIVE, MILPITAS, CALIFORNIA, 95035
Covered Properties
(2)
Fault Discrimination and Calibration of Scatterometry Overlay Targets
Method and Target Design for Fault Discrimination and Calibration of Scatterometry Overlay Target
Application:
62/412,730 →