IP Library › Patent Application 62412730
Patent Application Provisional
App. No. 62/412,730 · Confirmation No. 8549

Method and Target Design for Fault Discrimination and Calibration of Scatterometry Overlay Target

Provisional Application Expired
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 Code Description Pages PDF
2016-11-07 APP.FILE.REC Filing Receipt 3 View
2016-10-25 TR.PROV Provisional Cover Sheet (SB16) 3 View
2016-10-25 SPEC Specification 5 View
2016-10-25 WFEE Fee Worksheet (SB06) 2 View
2016-10-25 N417 Electronic Filing System Acknowledgment Receipt 2 View
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Quick Facts
App. No.
62/412,730
Filed
2016-10-25