Patent Assignment
Reel/Frame 044236/0781
Assignment of Assignor's Interest
Recorded: 2017-11-28
Pages: 6
Assignors
AMAHISA, KENJI
Executed: 2017-11-16
YOSHIDA, TAKESHI
Executed: 2017-11-07
NAMBA, TOSHIMITSU
Executed: 2017-10-13
Assignee
SCREEN HOLDINGS CO., LTD.
TENJINKITA-MACHI 1-1, TERANOUCHI-AGARU 4-CHOME, HORIKAWA-DORI, KAMIGYO-KU, KYOTO-SHI, KYOTO, 602-8585, JAPAN
Covered Property
(1)
Substrate Processing Apparatus and Substrate Processing Method