Patent Assignment
Reel/Frame 044275/0502
Assignment of Assignor's Interest
Recorded: 2017-12-01
Pages: 6
Assignors
LEVINSKI, VLADIMIR
Executed: 2016-06-20
PASKOVER, YURI
Executed: 2016-09-28
KANDEL, DANIEL
Executed: 2016-07-19
Assignee
KLA-TENCOR CORPORATION
ONE TECHNOLOGY DRIVE, MILPITAS, CALIFORNIA, 95035
Covered Property
(1)
Self-Moiré Target Design Principles for Measuring Unresolved Device-Like Pitches