Patent Assignment
Reel/Frame 044374/0511
Assignment of Assignor's Interest
Recorded: 2017-12-12
Pages: 5
Assignors
LIU, TSU-JAE
Executed: 2017-11-20
ZHANG, XI
Executed: 2017-12-05
ZHENG, PENG
Executed: 2017-12-07
Assignee
THE REGENTS OF THE UNIVERSITY OF CALIFORNIA
1111 FRANKLIN STREET, 12TH FL., OAKLAND, CALIFORNIA, 94607-5200
Covered Property
(1)
Enhanced Patterning of Integrated Circuit Layer by Tilted Ion Implantation