Patent Assignment
Reel/Frame 044500/0032
Assignment of Assignor's Interest
Recorded: 2017-12-28
Pages: 3
Assignor
TANABE, NOBUAKI
Executed: 2017-12-25
Assignee
ASM IP HOLDING B.V.
VERSTERKERSTRAAT 8, ALMERE, 1322 AP, NETHERLANDS
Covered Property
(1)
Cooling System, Substrate Processing System and Flow Rate Adjusting Method for Cooling Medium