Patent Assignment
Reel/Frame 044511/0597
Assignment of Assignor's Interest
Recorded: 2018-01-01
Pages: 6
Assignors
CHU, ALBERT
Executed: 2017-12-22
LAI, KAFAI
Executed: 2017-12-25
CLEVENGER, LAWRENCE A.
Executed: 2017-12-21
Assignee
INTERNATIONAL BUSINESS MACHINES CORPORATION
NEW ORCHARD ROAD, ARMONK, NEW YORK, 10504
Covered Property
(1)
Multi-Patterning Techniques for Fabricating an Array of Metal Lines with Different Widths