Patent Assignment
Reel/Frame 044559/0008
Assignment of Assignor's Interest
Recorded: 2018-01-08
Pages: 7
Assignors
KATO, HITOSHI
Executed: 2017-12-14
OHIZUMI, YUKIO
Executed: 2017-12-14
HONMA, MANABU
Executed: 2017-12-14
KOBAYASHI, TAKESHI
Executed: 2017-12-14
Assignee
TOKYO ELECTRON LIMITED
AKASAKA BIZ TOWER, 3-1 AKASAKA 5-CHOME, MINATO-KU, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Substrate Processing Apparatus