Substrate processing apparatus

1. A substrate processing apparatus for performing film formation by supplying a processing gas to a substrate, comprising:

a rotary table provided in a processing container;

a mounting stand provided to mount the substrate on one surface side of the rotary table and configured to be revolved by rotating the rotary table;

a processing gas supply part configured to supply a processing gas to a region through which the mounting stand passes by the rotation of the rotary table;

a rotation shaft rotatably provided in a portion rotating together with the rotary table and configured to support the mounting stand;

a magnetic gear mechanism including:

a rotatable driven gear provided on the rotation shaft, and including a disk-shaped plate; and

a rotatable driving gear provided below the driven gear, and including an annular plate-like member provided along an entire circumference of a revolution trajectory of the driven gear so as to overlap the revolution trajectory of the driven gear in a vertical direction;

a rotating mechanism configured to rotate the driving gear; and

a controller:

including a memory part, an input part, and a data processing part, which are connected to one another;

storing, in the memory part, a predetermined relationship between a rotation speed of the driven gear and a velocity difference between an angular velocity of the driven gear due to revolution and an angular velocity of the driving gear; and

configured to set, by the data processing part, a revolution number of the driving gear based on the rotation speed inputted to the input part, a revolution number of the rotary table and the predetermined relationship stored in the memory part,

wherein the angular velocity of the driving gear is set between a value at which an absolute value of the velocity difference is zero and a value at which the velocity difference and the rotation speed of the driven gear are maintained in a substantially proportional relationship.

2. The apparatus of claim 1 , wherein the driven gear includes N pole portions and S pole portions arranged alternately along a rotation direction of the driven gear over an entire circumference of the driven gear, and

the driving gear includes N pole portions and S pole portions arranged alternately along the revolution trajectory over an entire circumference of the driving gear.

3. The apparatus of claim 1 , wherein the driven gear and the driving gear include magnetic pole portions formed of permanent magnets.

4. The apparatus of claim 1 , wherein an interior of the processing container is configured to be in a vacuum atmosphere,

the driving gear is provided on an air atmosphere side, and

a partition member is provided between the driven gear and the driving gear, the partition member configured to partition the air atmosphere and the vacuum atmosphere and made of a material that allows a magnetic force line to pass therethrough.

5. The apparatus of claim 1 , further comprising:

the controller connected to the rotating mechanism is configured to rotate the driving gear, and

the controller is configured to transmit a rotation speed control signal to the rotating mechanism, and the rotation speed control signal corresponds to the set revolution number of the driving gear.

6. The apparatus of claim 1 , wherein the driven gear further includes magnetic pole portions provided on a lower surface of the disk-shaped plate so as to extend radially from a central portion of the lower surface in a lateral direction, and

wherein the driving gear further includes magnetic pole portions arranged on an upper surface of the annular plate-like member along an outer circumference of the revolution trajectory of the driven gear, the upper surface of the annular plate-like member being located opposite the lower surface of the disk-shaped plate.