Patent Assignment
Reel/Frame 044577/0517
Assignment of Assignor's Interest
Recorded: 2018-01-09
Pages: 3
Assignors
FERRARA, JOSEPH
Executed: 2018-01-09
TERRY, BRIAN
Executed: 2018-01-09
BAGGETT, JOHN
Executed: 2018-01-09
Assignee
AXCELIS TECHNOLOGIES, INC.
108 CHERRY HILL DRIVE, BEVERLY, MASSACHUSETTS, 01915
Covered Property
(1)
Active Workpiece Heating or Cooling for an Ion Implantation System
Application:
15/866,209 →
Publication:
US 2018/0197761
Related Assignments
(2)
Other recorded transfers of the patent in this record — the chain of ownership.
Security Interest
Jul 31, 2020
From: AXCELIS TECHNOLOGIES, INC.
To: SILICON VALLEY BANK, AS ADMINISTRATIVE AGENT
Reel/Frame 053375/0055 →
Release of Security Interest
Apr 7, 2023
From: SILICON VALLEY BANK A DIVISION OF FIRST-CITIZENS BANK & TRUST COMPANY
To: AXCELIS TECHNOLOGIES, INC.
Reel/Frame 063270/0277 →