Patent Assignment
Reel/Frame 044586/0709
Assignment of Assignor's Interest
Recorded: 2018-01-10
Pages: 7
Assignors
YOO, BEOM JIN
Executed: 2018-01-04
NAM, SANG KI
Executed: 2018-01-03
HEO, KWANG-YOUB
Executed: 2018-01-03
WOO, JEHUN
Executed: 2018-01-04
TOMITA, MASAHIKO
Executed: 2018-01-04
PASHKOVSKIY, VASILY
Executed: 2018-01-04
Assignee
SAMSUNG ELECTRONICS CO., LTD.
129, SAMSUNG-RO, YEONGTONG-GU, SUWON-SI, GYEONGGI-DO, 16677, KOREA, REPUBLIC OF
Covered Property
(1)
Plasma Processing Apparatus and Method, and Method of Manufacturing Semiconductor Device Using the Same