Patent Assignment
Reel/Frame 044666/0650
Assignment of Assignor's Interest
Recorded: 2018-01-19
Pages: 5
Assignors
KUBOTA, SHINJI
Executed: 2018-01-09
DOKAN, TAKASHI
Executed: 2018-01-09
KOYAMA, KOJI
Executed: 2018-01-09
MATSUMOTO, NAOKI
Executed: 2018-01-09
Assignee
TOKYO ELECTRON LIMITED
3-1, AKASAKA 5-CHOME, MINATO-KU, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Plasma Processing Apparatus and Plasma Processing Method