Patent Assignment
Reel/Frame 044705/0535
Assignment of Assignor's Interest
Recorded: 2018-01-23
Pages: 3
Assignor
KONDOH, KEISUKE
Executed: 2018-01-12
Assignee
TOKYO ELECTRON LIMITED
3-1 AKASAKA 5-CHOME, MINATO-KU, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Substrate Transfer Chamber, Substrate Processing System, and Method for Replacing Gas in Substrate Transfer Chamber