Patent Assignment
Reel/Frame 044795/0289
Assignment of Assignor's Interest
Recorded: 2018-02-01
Pages: 5
Assignors
YAMAGUCHI, SHIN
Executed: 2018-01-29
MITSUMORI, AKIYOSHI
Executed: 2018-01-29
ARITA, TAKEHIKO
Executed: 2018-01-29
MURAKAMI, KOICHI
Executed: 2018-01-29
Assignee
TOKYO ELECTRON LIMITED
3-1, AKASAKA 5-CHOME, MINATO-KU, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Processing Apparatus for Processing Target Object