Patent Assignment
Reel/Frame 044838/0182
Assignment of Assignor's Interest
Recorded: 2018-02-06
Pages: 3
Assignee
TOKYO ELECTRON LIMITED
3-1 AKASAKA 5-CHOME, MINATO-KU, TOKYO 107-6325, JAPAN
Covered Property
(1)
Substrate Coating Apparatus for Floating Substrate and Method