Patent Assignment
Reel/Frame 044881/0870
Assignment of Assignor's Interest
Recorded: 2018-02-09
Pages: 10
Assignors
MORIKAWA, ATSUSHI
Executed: 2017-12-20
SHIMADA, MASAKAZU
Executed: 2017-12-20
KASAI, TAKESHI
Executed: 2017-12-20
SUZAKI, KENICHI
Executed: 2017-12-20
YAMAZAKI, HIROHISA
Executed: 2017-12-20
NAGATOMI, YOSHIMASA
Executed: 2017-12-20
Assignee
HITACHI KOKUSAI ELECTRIC INC.
15-12, NISHI-SHIMBASHI 2-CHOME,, MINATO-KU, TOKYO, 105-8039, JAPAN
Covered Property
(1)
Substrate Processing Apparatus, Method for Manufacturing Semiconductor Device and Vaporizer
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.