Patent Assignment
Reel/Frame 044942/0765
Assignment of Assignor's Interest
Recorded: 2018-02-15
Pages: 6
Assignee
TOKYO ELECTRON LIMITED
3-1, AKASAKA 5-CHOME, MINATO-KU,, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Film Deposition Method and Plasma Processing Apparatus