Patent Assignment
Reel/Frame 044954/0959
Assignment of Assignor's Interest
Recorded: 2018-02-16
Pages: 3
Assignor
OHTAKE, HIROTO
Executed: 2017-05-24
Assignee
TOKYO ELECTRON LIMITED
AKASAKA BIZ TOWER, 3-1 AKASAKA 5-CHOME, MINATO-KU, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Multi-Frequency Power Modulation for Etching High Aspect Ratio Features