Patent Assignment
Reel/Frame 044973/0668
Assignment of Assignor's Interest
Recorded: 2018-02-20
Pages: 3
Assignor
ISHIZAKA, TADAHIRO
Executed: 2018-02-02
Assignee
TOKYO ELECTRON LIMITED
3-1 AKASAKA 5-CHOME, MINATO-KU, TOKYO 107-6325, JAPAN
Covered Property
(1)
Method of Manufacturing Ruthenium Wiring