Patent Assignment
Reel/Frame 044985/0929
Assignment of Assignor's Interest
Recorded: 2018-02-21
Pages: 7
Assignors
SANO, ATSUSHI
Executed: 2018-02-16
KAMEDA, KENJI
Executed: 2018-02-16
TAKASAWA, YUSHIN
Executed: 2018-02-19
Assignee
HITACHI KOKUSAI ELECTRIC INC.
15-12, NISHI-SHIMBASHI 2-CHOME,, MINATO-KU, TOKYO, 105-8039, JAPAN
Covered Property
(1)
Method of Manufacturing Semiconductor Device, Substrate Processing Apparatus, and Recording Medium
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.