Patent Assignment
Reel/Frame 044987/0757
Assignment of Assignor's Interest
Recorded: 2018-02-21
Pages: 6
Assignors
TAKAHASHI, YUTAKA
Executed: 2018-02-16
MURATA, MASAHIRO
Executed: 2018-02-16
KATO, HITOSHI
Executed: 2018-02-16
Assignee
TOKYO ELECTRON LIMITED
3-1, AKASAKA 5-CHOME, MINATO-KU,, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Film Deposition Method and Film Deposition Apparatus