Film deposition method and film deposition apparatus

1. A film deposition method for filling a recessed pattern formed in a surface of a substrate with a film from a bottom surface of the recessed pattern, the method comprising steps of:

forming an adsorption blocking group by adsorbing chlorine gas activated by plasma on a top surface of the substrate and an upper portion of the recessed pattern, the chlorine gas being supplied to react with an H group, thereby producing HCl;

adsorbing a source gas that contains chlorine and one of silicon and a metal on a lower portion of the recessed pattern where the adsorption blocking group is not formed, by supplying the source gas to the surface of the substrate including the recessed pattern; and

depositing a molecular layer of a nitride film produced by a reaction of the source gas and a nitriding gas on the lower portion of the recessed pattern by supplying the nitriding gas to the surface of the substrate including the recessed pattern.

2. The film deposition method according to claim 1 ,

wherein the steps of forming the adsorption blocking group, adsorbing the source gas, and depositing the molecular layer of the nitride film is made a cycle, and

wherein the nitride film is filled in the recessed pattern by repeating the cycle predetermined number of times.

3. The film deposition method according to claim 2 ,

wherein the substrate is arranged along a circumferential direction of a turntable,

wherein a nitriding gas supply region, a chlorine gas supply region and a source gas supply region are arranged above the turntable and along a rotational direction of the turntable apart from each other, and

wherein the steps of forming the adsorption blocking group, adsorbing the source gas, and depositing the molecular layer of the nitride film are sequentially repeated by rotating the turntable in the rotational direction, thereby filling the recessed pattern with the nitride film.

4. The film deposition method according to claim 3 ,

wherein purge gas supply regions configured to supply a purge gas to the surface of the substrate are provided between the chlorine gas supply region and the source gas supply region, and between the source gas supply region and the nitriding gas supply region, respectively, and

further comprising:

supplying the purge gas between the steps of forming, the adsorption blocking group and adsorbing the source gas; and

supplying the purge gas between the steps of adsorbing the source gas and depositing the molecular layer of the nitride film.

5. The film deposition method according to claim 1 , wherein the step of adsorbing the source gas comprises adsorbing the source gas that contains titanium or aluminum, and chlorine on the lower portion of the recessed pattern.

6. The film deposition method according to claim 1 , wherein the substrate is made of silicon.

7. The film deposition method according to claim 6 , wherein the substrate includes an undercoat film preliminarily formed on the surface including the recessed pattern.

8. The film deposition method according to claim 7 , wherein the undercoat film is made of silicon nitride or silicon oxide.

9. The film deposition method according to claim 6 , further comprising:

depositing an undercoat film on the surface of the substrate including the recessed pattern before the step of forming the adsorption blocking group.

10. The film deposition method according to claim 9 ,

wherein the step of depositing the undercoat film comprises:

adsorbing a silicon-containing gas on the surface of the substrate including the recessed pattern by supplying the silicon-containing gas to the substrate, and

depositing a molecular layer of a silicon nitride film produced by a reaction of the silicon-containing gas and a nitriding gas by supplying the nitriding gas to the surface of the substrate including the recessed pattern.

11. The film deposition method according to claim 10 ,

wherein the source gas contains silicon and chlorine, and

wherein the source gas containing silicon and chlorine is used as the silicon-containing gas.

12. The film deposition method according to claim 10 ,

wherein the steps of adsorbing the silicon-containing gas and depositing the molecular layer of the silicon nitride film is periodically repeated predetermined number of times until the undercoat film reaches a predetermined thickness.

13. The film deposition method according to claim 1 ,

wherein the step of depositing the molecular layer of the nitride film comprises supplying the nitriding gas while activating the nitriding gas by plasma.