Patent Assignment
Reel/Frame 045008/0536
Assignment of Assignor's Interest
Recorded: 2018-02-22
Pages: 6
Assignee
HITACHI KOKUSAI ELECTRIC INC.
15-12 NISHI-SHIMBASHI 2-CHOME, MINATO-KU, TOKYO, 105-8039, JAPAN
Covered Property
(1)
Method of Manufacturing Semiconductor Device, Substrate Processing Apparatus, and Recording Medium
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.