Patent Assignment
Reel/Frame 045146/0552
Assignment of Assignor's Interest
Recorded: 2018-03-08
Pages: 2
Assignor
YAMAGUCHI, YOSHIHIDE
Executed: 2018-02-06
Assignee
HITACHI HIGH-TECHNOLOGIES CORPORATION
24-14, NISHI SHIMBASHI 1-CHOME, MINATO-KU, TOKYO, 105-8717, JAPAN
Covered Property
(1)
A Semiconductor Manufacturing Apparatus for Manufacturing a Semiconductor Device Having a High-K Insulating Film, and A Method for Manufacturing the Semiconductor Device
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.