Patent Assignment
Reel/Frame 045221/0295
Assignment of Assignor's Interest
Recorded: 2018-03-15
Pages: 6
Assignee
HITACHI KOKUSAI ELECTRIC INC.
15-12, NISHI-SHIMBASHI 2-CHOME, MINATO-KU, TOKYO, 105-8039, JAPAN
Covered Property
(1)
Method of Processing Substrate, Substrate Processing Apparatus, Recording Medium, and Method of Manufacturing Semiconductor Device
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.