Patent Assignment
Reel/Frame 045282/0778
Assignment of Assignor's Interest
Recorded: 2018-03-20
Pages: 7
Assignors
KOGURA, SHINTARO
Executed: 2018-02-23
SASAJIMA, RYOTA
Executed: 2018-02-23
TAKAGI, KOSUKE
Executed: 2018-03-02
Assignee
HITACHI KOKUSAI ELECTRIC INC.
15-12, NISHI-SHIMBASHI 2-CHOME,, MINATO-KU, TOKYO, 105-8039, JAPAN
Covered Property
(1)
Method of Manufacturing Semiconductor Device, Substrate Processing Apparatus, and Recording Medium
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.