Patent Assignment
Reel/Frame 045321/0178
Assignment of Assignor's Interest
Recorded: 2018-03-22
Pages: 2
Assignor
YAMAGUCHI, YOSHIHIDE
Executed: 2018-02-21
Assignee
HITACHI HIGH-TECHNOLOGIES CORPORATION
24-14, NISHI SHIMBASHI 1-CHOME, MINATO-KU, TOKYO, 105-8717, JAPAN
Covered Property
(1)
Semiconductor Manufacturing Apparatus and Method for Manufacturing Semiconductor Device
Application:
15/906,933 →
Publication:
US 2019/0131120
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.