Patent Assignment
Reel/Frame 045405/0110
Change of Name
Recorded: 2018-02-22
Pages: 4
Assignor
STEAG RTP SYSTEMS, INC.
Executed: 2001-04-11
Assignee
MATTSON THERMAL PRODUCTS, INC.
47131 BAYSIDE PARKWAY, FREMONT, CALIFORNIA, 94538
Covered Properties
(6)
Apparatus and Method for Determining the Temperature of Objects in Thermal Processing Chambers
Patent:
6,056,434 →
Application:
09/041,536 →
System for Measuring the Temperature of a Semiconductor Wafer During Thermal Processing
Patent:
6,204,484 →
Application:
09/052,506 →
Heating Device for Semiconductor Wafers
Patent:
5,970,214 →
Application:
09/078,856 →
Heating Device for Semiconductor Wafers
Patent:
5,930,456 →
Application:
09/078,865 →
Apparatus and Process for Measuring the Templerature of Semiconductor Wafers in the Presence of Radiation Absorbing Gases
Patent:
6,034,357 →
Application:
09/093,493 →
Process for Forming Thin Dielectric Layers in Semiconductor Devices
Patent:
6,281,141 →
Application:
09/246,821 →
Related Assignments
(4)
Other recorded transfers of the patents in this record — the chain of ownership.
Certificate of Dissolution
Feb 22, 2018
From: MATTSON THERMAL PRODUCTS, INC.
To: MATTSON TECHNOLOGY, INC.
Reel/Frame 045405/0116 →
Security Interest
Aug 27, 2018
From: MATTSON TECHNOLOGY, INC.
To: EAST WEST BANK
Reel/Frame 046956/0348 →
Assignment of Assignor's Interest
Sep 30, 2019
From: MATTSON TECHNOLOGY, INC.
To: MATTSON TECHNOLOGY, INC.; BEIJING E-TOWN SEMICONDUCTOR TECHNOLOGY, CO., LTD
Reel/Frame 050582/0796 →
Release of Security Interest
Apr 15, 2021
From: EAST WEST BANK
To: MATTSON TECHNOLOGY, INC.
Reel/Frame 055950/0452 →