Patent Assignment
Reel/Frame 045410/0941
Assignment of Assignor's Interest
Recorded: 2018-04-02
Pages: 8
Assignors
MIYAKURA, TAKAHIRO
Executed: 2018-02-15
MORIYA, ATSUSHI
Executed: 2018-02-21
NAKAISO, NAOHARU
Executed: 2018-02-21
HAGA, KENSUKE
Executed: 2018-02-15
Assignee
HITACHI KOKUSAI ELECTRIC INC.
15-12, NISHI-SHIMBASHI 2-CHOME,, MINATO-KU, TOKYO, 105-8039, JAPAN
Covered Property
(1)
Method of Manufacturing Semiconductor Device, Substrate Processing Apparatus and Recording Medium
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.