Patent Assignment
Reel/Frame 045434/0893
Assignment of Assignor's Interest
Recorded: 2018-04-04
Pages: 4
Assignor
LEE, CHUNG-CHIEH
Executed: 2018-02-02
Assignee
TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
NO. 8, LI-HSIN RD. 6, SCIENCE BASED INDUSTRIAL PARK, HSINCHU, 300, TAIWAN
Covered Property
(1)
Method of Manufacturing Semiconductor Device and Method of Cleaning Substrate