Patent Assignment
Reel/Frame 045481/0975
Assignment of Assignor's Interest
Recorded: 2018-04-09
Pages: 6
Assignors
CHENG, KANGGUO
Executed: 2017-04-20
LIU, XUEFENG
Executed: 2017-04-21
XU, PENG
Executed: 2017-04-21
XU, YONGAN
Executed: 2017-04-21
Assignee
INTERNATIONAL BUSINESS MACHINES CORPORATION
NEW ORCHARD ROAD, ARMONK, NEW YORK, 10504
Covered Property
(1)
Forming Vertical Transport Field Effect Transistors with Uniform Bottom Spacer Thickness