Patent Assignment
Reel/Frame 045488/0459
Assignment of Assignor's Interest
Recorded: 2018-03-05
Pages: 3
Assignors
MIYAZAKI, KAZUHITO
Executed: 2018-02-20
KAKINO, AKIRA
Executed: 2018-02-26
YOSHITOMI, WATARU
Executed: 2018-02-20
Assignee
TOKYO ELECTRON LIMITED
3-1 AKASAKA 5-CHOME, MINATO-KU, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Droplet Ejecting Apparatus Having Correctable Movement Mechanism for Workpiece Table and Droplet Ejecting Method