Patent Assignment
Reel/Frame 045545/0046
Assignment of Assignor's Interest
Recorded: 2018-04-06
Pages: 3
Assignor
WALTER, HOLGER
Executed: 2018-03-24
Assignee
CARL ZEISS SMT GMBH
RUDOLF-EBER-STRASSE 2, OBERKOCHEN, 73447, GERMANY
Covered Property
(1)
Optical Correction Arrangement, Projection Objective Having Such an Optical Correction Arrangement and Microlithographic Apparatus Having Such a Projection Objective