Patent Assignment
Reel/Frame 045581/0466
Assignment of Assignor's Interest
Recorded: 2018-03-13
Pages: 8
Assignors
EGASHIRA, KEISUKE
Executed: 2018-03-08
GOSHI, GENTARO
Executed: 2018-03-09
MARUMOTO, HIROSHI
Executed: 2018-03-08
TSUKANO, KENTO
Executed: 2018-03-09
Assignee
TOKYO ELECTRON LIMITED
3-1 AKASAKA 5-CHOME, MINATO-KU, TOKYO 107-6325, JAPAN
Covered Property
(1)
Substrate Processing Apparatus and Substrate Processing Method