Patent Assignment
Reel/Frame 045634/0855
Assignment of Assignor's Interest
Recorded: 2018-04-25
Pages: 3
Assignee
TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD
8, LI-HSIN RD. 6, HSINCHU SCIENCE PARK, HSINCHU, 300-78, TAIWAN
Covered Property
(1)
Structures for Acoustic Wave Overlay Error Determination Using Periodic Structures