Structures for acoustic wave overlay error determination using periodic structures
View Patent ↗A structure includes a first periodic structure positioned on a chip, the first periodic structure comprising a material of a first layer disposed on the chip. The structure further includes a second periodic structure positioned within the region of the chip adjacent the first periodic structure, the second periodic structure comprising a second material of a second layer disposed on the chip. The structure further includes an acoustic wave transmitter device disposed on the chip and an acoustic wave receiver device disposed on the chip.
1. A structure comprising:
a first periodic structure positioned on a chip, the first periodic structure comprising a material of a first layer disposed on the chip, wherein the first periodic structure comprises a two-dimensional array of features;
a second periodic structure positioned within a region of the chip adjacent the first periodic structure, the second periodic structure comprising a second material of a second layer disposed on the chip;
an acoustic wave transmitter device disposed on the chip; and
an acoustic wave receiver device disposed on the chip.
2. The structure of claim 1 , wherein the first period structure and the second periodic structure are positioned between the acoustic wave transmitter device and the acoustic wave receiver device.
3. The structure of claim 1 , wherein the acoustic wave receiver device is adjacent the acoustic wave transmitter device.
4. The structure of claim 1 , wherein features within the array of features have one of: a rectangular shape, an elliptical shape, a circular shape, or a square shape.
5. The structure of claim 1 , wherein features of the first periodic structure are intermingled with features of the second periodic structure.
6. The structure of claim 5 , wherein the features of the first periodic structure and the features of the second periodic structure are positioned in alternating rows.
7. The structure of claim 5 , wherein the features of the first periodic structure and the features of the second periodic structure are positioned in a checkered pattern.
8. The structure of claim 1 , wherein features of the first periodic structure circumscribe features of the second periodic structure.
9. The structure of claim 1 , further comprising, a piezoelectric layer underneath the first periodic structure and the second periodic structure.
10. The structure of claim 1 , further comprising, regions of the chip, each region comprising additional periodic structures, an additional acoustic wave receiver, and an additional acoustic wave transmitter, the regions being positioned in series.
11. The structure of claim 1 , further comprising, regions of the chip, each region comprising additional periodic structures, an additional acoustic wave receiver, and an additional acoustic wave transmitter, the regions being positioned in parallel.
12. A device comprising:
an acoustic wave transmitter positioned on a chip;
an acoustic wave receiver positioned on the chip;
a first periodic structure positioned on the chip, the first periodic structure comprising a first material; and
a second periodic structure positioned on the chip, the second periodic structure comprising a second material
wherein the acoustic wave transmitter device is configured to transmit an acoustic wave across both the first periodic structure and the second periodic structure.
13. The device of claim 12 , wherein the acoustic wave transmitter comprises an interdigital transducer.
14. The device of claim 12 , wherein the acoustic wave transmitter comprises an acoustic emitter.
15. A device comprising:
a first material layer on a chip, the first material layer comprising a first periodic structure within an overlay mark region of the chip;
a second material layer on the chip, the second material layer comprising a second periodic structure in the overlay mark region;
an acoustic transmitter device disposed within the overlay mark region, the acoustic transmitter device configured to transmit an acoustic wave across both the first periodic structure and the second periodic structure; and
an acoustic wave receiver device configured to detect the acoustic wave.
16. The device of claim 15 , wherein the acoustic wave transmitter comprises an interdigital transducer.
17. The device of claim 15 , wherein the acoustic wave transmitter comprises an acoustic emitter.
18. The device of claim 15 , further comprising, regions of the chip, each region comprising additional periodic structures, an additional acoustic wave receiver, and an additional acoustic wave transmitter, the regions being positioned in series.
19. The device of claim 15 , further comprising, regions of the chip, each region comprising additional periodic structures, an additional acoustic wave receiver, and an additional acoustic wave transmitter, the regions being positioned in parallel.
20. The device of claim 15 , wherein the first periodic structure comprises a two-dimensional array of features.