Patent Assignment
Reel/Frame 045730/0479
Assignment of Assignor's Interest
Recorded: 2018-05-07
Pages: 7
Assignors
SHIM, SEUNG BO
Executed: 2018-04-16
KIM, HYUK
Executed: 2018-04-25
LIM, SUN TAEK
Executed: 2018-04-16
CHOE, JAE MYUNG
Executed: 2018-04-16
LEE, JEON IL
Executed: 2018-04-16
CHO, SUNG-IL
Executed: 2018-04-30
Assignee
SAMSUNG ELECTRONICS CO., LTD.
129, SAMSUNG-RO, YEONGTONG-GU, SUWON-SI, GYEONGGI-DO, 16677, KOREA, REPUBLIC OF
Covered Property
(1)
Plasma Treatment Apparatus and Method of Fabricating Semiconductor Device Using the Same