Patent Assignment
Reel/Frame 045749/0065
Assignment of Assignor's Interest
Recorded: 2018-05-09
Pages: 8
Assignors
FAN, SU CHEN
Executed: 2017-05-12
LIU, ZUOGUANG
Executed: 2017-05-12
WU, HENG
Executed: 2017-05-16
YAMASHITA, TENKO
Executed: 2017-05-12
Assignee
INTERNATIONAL BUSINESS MACHINES CORPORATION
NEW ORCHARD ROAD, ARMONK, NEW YORK, 10504
Covered Property
(1)
Embedded Bottom Metal Contact Formed by a Self-Aligned Contact Process for Vertical Transistors