Patent Assignment
Reel/Frame 045810/0597
Assignment of Assignor's Interest
Recorded: 2018-05-15
Pages: 10
Assignors
IZUMOTO, KENJI
Executed: 2016-10-19
MIURA, TAKEMITSU
Executed: 2016-10-19
KOBAYASHI, KENJI
Executed: 2016-10-19
SAITO, KAZUHIDE
Executed: 2016-10-20
IWASAKI, AKIHISA
Executed: 2016-08-30
Assignee
SCREEN HOLDINGS CO., LTD.
TENJINKITA-MACHI 1-1, TERANOUCHI-AGARU 4-CHOME, HORIKAWA-DORI, KAMIGYO-KU, KYOTO-SHI, KYOTO, 602-8585, JAPAN
Covered Property
(1)
Substrate Processing Apparatus and Substrate Processing Method