Patent Assignment
Reel/Frame 045917/0317
Assignment of Assignor's Interest
Recorded: 2018-05-29
Pages: 4
Assignors
WANG, YUHOU
Executed: 2018-05-07
MARTIN, MICHAEL JOHN
Executed: 2018-05-11
MCCHESNEY, JON
Executed: 2018-05-25
PATERSON, ALEXANDER MILLER
Executed: 2018-05-11
Assignee
LAM RESEARCH CORPORATION
4650 CUSHING PARKWAY, FREMONT, CALIFORNIA, 94538
Covered Property
(1)
Image Based Plasma Sheath Profile Detection on Plasma Processing Tools