Assignment of Assignor's Interest

Recorded: 2018-06-01 Pages: 3

Assignor

GREADY, DAVID

Executed: 2018-05-18

Assignee

KLA-TENCOR CORPORATION

ONE TECHNOLOGY DRIVE, MILPITAS, CALIFORNIA, 95035

Covered Properties (2)

Hybrid Overlay Target Design for Imaging-Based Overlay and Scatterometry-Based Overlay

Patent: 11,112,369 →

Application: 15/995,731 →

Publication: US 2018/0364179

Hybrid Overlay Target Design for Imaging Based Overlay and Scatterometry Based Overlay

Application: 62/521,782 →