IP Library › Patent Application 62521782
Patent Application Provisional
App. No. 62/521,782 · Confirmation No. 4343

Hybrid Overlay Target Design for Imaging Based Overlay and Scatterometry Based Overlay

Inventor: David Gready
Provisional Application Expired
⬇ PDF
 Code Description Pages PDF
2017-06-22 APP.FILE.REC Filing Receipt 3 View
2017-06-19 TR.PROV Provisional Cover Sheet (SB16) 3 View
2017-06-19 SPEC Specification 6 View
2017-06-19 WFEE Fee Worksheet (SB06) 2 View
2017-06-19 N417 Electronic Filing System Acknowledgment Receipt 2 View
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Quick Facts
App. No.
62/521,782
Filed
2017-06-19