Patent Assignment
Reel/Frame 046002/0680
Assignment of Assignor's Interest
Recorded: 2018-06-06
Pages: 5
Assignor
NAGAIKE, HIROSHI
Executed: 2018-06-01
Assignee
TOKYO ELECTRON LIMITED
3-1, AKASAKA 5-CHOME, MINATO-KU,, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Substrate Container, Controller, and Abnormality Detection Method