Patent Assignment
Reel/Frame 046007/0057
Assignment of Assignor's Interest
Recorded: 2018-06-06
Pages: 3
Assignors
HIESTER, JACOB L.
Executed: 2018-06-06
BLANK, RICHARD
Executed: 2018-06-05
THAULAD, PETER
Executed: 2018-06-04
KONKOLA, PAUL
Executed: 2018-05-25
Assignee
LAM RESEARCH CORPORATION
4650 CUSHING PARKWAY, FREMONT, CALIFORNIA, 94538
Covered Property
(1)
Auto-Calibration to a Station of a Process Module That Spins a Wafer