Patent Assignment
Reel/Frame 046027/0106
Assignment of Assignor's Interest
Recorded: 2018-06-08
Pages: 7
Assignors
VUKKADALA, PRADEEP
Executed: 2016-09-08
VEERARAGHAVAN, SATHISH
Executed: 2016-09-09
SINHA, JAYDEEP K.
Executed: 2017-11-17
Assignee
KLA-TENCOR CORPORATION
ONE TECHNOLOGY DRIVE, MILPITAS, CALIFORNIA, 95035
Covered Property
(1)
Overlay and Semiconductor Process Control Using a Wafer Geometry Metric