Patent Assignment
Reel/Frame 046105/0044
Assignment of Assignor's Interest
Recorded: 2018-06-15
Pages: 5
Assignors
VAN DER SCHAAR, MAURITS
Executed: 2016-02-19
ZHANG, YOUPING
Executed: 2016-02-24
XU, HUA
Executed: 2016-02-19
Assignee
ASML NETHERLANDS B.V.
P.O. BOX 324, VELDHOVEN, 5500 AH, NETHERLANDS
Covered Property
(1)
Alternative Target Design for Metrology Using Modulation Techniques